Handbook of sputter deposition technology : principles, technology and applications

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Handbook of sputter deposition technology : principles, technology and applications

Bibliographic Details
Main Authors:	Wasa, Kiyotaka (Author), Hayakawa, Shigeru , 1925- (Author)
Format:	Book
Published:	New Jersey : Noyes Pub., , 1992
Subjects:	Cathode sputtering (Plating process) Thin films

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