Handbook of sputter deposition technology principles, technology and applications

Bibliographic Details
Main Authors: Wasa, Kiyotaka (Author), Hayakawa, Shigeru 1925- (Author)
Format: Book
Published: New Jersey Noyes Pub., 1992
Subjects:

MARC

LEADER 00000cam a2200000 7i4500
001 0000030040
008 021119n
090 0 0 |a TS695  |b .W37 1991 
100 0 |a Wasa, Kiyotaka  |e author 
245 0 0 |a Handbook of sputter deposition technology   |b principles, technology and applications   |c by Kiyotaka Wasa and Shigeru Hayakawa 
260 2 |a New Jersey   |b Noyes Pub.,   |c 1992 
300 |a xii, 304 p.   |c 25 cm. 
650 0 |a Cathode sputtering (Plating process) 
650 0 |a Thin films 
700 0 |a Hayakawa, Shigeru  |d 1925-  |e author 
999 |a 1000054802  |b Book  |c Close Access  |e Gong Badak Campus