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00000cam a2200000 7i4500 |
| 001 |
0000030040 |
| 005 |
20170419093000.0 |
| 008 |
021119n |
| 090 |
0 |
0 |
|a TS695
|b .W37 1991
|
| 100 |
0 |
|
|a Wasa, Kiyotaka ,
|e author
|
| 245 |
0 |
0 |
|a Handbook of sputter deposition technology :
|b principles, technology and applications
|c by Kiyotaka Wasa and Shigeru Hayakawa
|
| 260 |
2 |
|
|a New Jersey :
|b Noyes Pub., ,
|c 1992
|
| 300 |
|
|
|a xii, 304 p. ;
|c 25 cm.
|
| 650 |
|
0 |
|a Cathode sputtering (Plating process)
|
| 650 |
|
0 |
|a Thin films
|
| 700 |
0 |
|
|a Hayakawa, Shigeru ,
|d 1925- ,
|e author
|
| 999 |
|
|
|a 1000054802
|b Book
|c Close Access
|e Gong Badak Campus
|