Handbook of sputter deposition technology : principles, technology and applications

Handbook of sputter deposition technology : principles, technology and applications

Bibliographic Details
Main Authors: Wasa, Kiyotaka (Author), Hayakawa, Shigeru , 1925- (Author)
Format: Book
Published: New Jersey : Noyes Pub., , 1992
Subjects:
Cathode sputtering (Plating process)
Thin films
Description
Physical Description:xii, 304 p. ; 25 cm.

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