APA (7th ed.) Citation

Wasa, K., & Hayakawa, S. (1992). Handbook of sputter deposition technology: Principles, technology and applications. Noyes Pub..

Chicago Style (17th ed.) Citation

Wasa, Kiyotaka, and Shigeru Hayakawa. Handbook of Sputter Deposition Technology: Principles, Technology and Applications. New Jersey: Noyes Pub., 1992.

MLA (9th ed.) Citation

Wasa, Kiyotaka, and Shigeru Hayakawa. Handbook of Sputter Deposition Technology: Principles, Technology and Applications. Noyes Pub., 1992.