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Orientation imaging of macro-sized polysilicon grains on wafers using spatially resolved acoustic spectroscopy
by
Patel, Rikesh
,
Li, Wenqi
,
Smith, Richard J.
,
Sharples, Steve D.
,
Clark, Matt
Published 2017
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Acoustic methods
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Repository Type
Digital Repository
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Local University
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University of Nottingham Malaysia Campus
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Repository
Nottingham Research Data Repository
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Article
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Clark, Matt
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Li, Wenqi
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Patel, Rikesh
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Sharples, Steve D.
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Smith, Richard J.
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