Etching performance of silicon wafers with redesigned etching drum

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Etching performance of silicon wafers with redesigned etching drum

Etching process involves various chemical reactions and reflects significantly on silicon wafer quality. This master project addresses the major problem on wafers during etching that is wafer removal distribution throughout etching drum compartment. The etching drum has been redesigned to overcome t...

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Bibliographic Details
Main Author:	Dolah, Rozzeta
Format:	Thesis
Language:	English
Published:	2006
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utm.my/9445/ http://eprints.utm.my/9445/1/RozzetaDolahFKM2005.pdf

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