Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere

QR Code

Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere

Diamond-like carbon thin films were prepared at different substrate temperatures by using DC·PECVD at 1x10·1Torr in methane atmosphere. The DC-PECVD system was reconstructed for gelling higher substrate temperature up to 560°C. Raman spectroscopy has been used to study the effect of chemical bonding...

Full description

Bibliographic Details
Main Authors:	Sarmid, Suriany, Oeraman, Karim, Ismail, Bakar, Sakrani, Samsudi
Format:	Conference or Workshop Item
Language:	English
Published:	2006
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/9303/ http://eprints.utm.my/9303/1/SurianySarmid2006_EffectofSubemperatureontheProperties.pdf

Similar Items

The effect of substrate temperature on the structural and optical properties of diamond-like carbon thin film
by: Sarmid, Suriany
Published: (2007)

Diamond-like carbon formation for various positions by pulsed laser deposition
by: YAP, S, et al.
Published: (2005)

Pulsed Nd-Yag Laser Deposition Of Diamond-Like Carbon Films
by: Yap, Seong Shan
Published: (2007)

Target-plane deposition of diamond-like carbon in pulsed laser ablation of graphite
by: Yap, S.S., et al.
Published: (2007)

Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser
by: YAP, S, et al.
Published: (2008)

Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system
by: Saidin, M. A. R., et al.
Published: (2007)

Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system
by: Saidin, M. A. R., et al.
Published: (2007)

Effect of Co catalyst on PECVD growth of carbon nanotubes for NEMS applications
by: Lee, Mai Woon, et al.
Published: (2012)

The effect of Ni catalyst on the growth of multi-walled carbon nanotubes by PECVD method
by: Mai, Woon Lee, et al.
Published: (2015)

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
by: Dayangku Noorfazidah, Awang Sh'ri
Published: (2009)

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
by: Awang Sh'ri, Dayangku Noorfazidah
Published: (2009)

Silicon self-assembled growth of quantum dots grown on corning glass (7059) substrate
by: Sakrani, Samsudi, et al.
Published: (2007)

Carbon nanowall-based nanocomposites synthesised by HF-PECVD for photoelectrochemical applications / Noor Hamizah Khanis
by: Noor Hamizah , Khanis
Published: (2019)

Adhesion Strength of HFCVD Diamond Coating on WC Substrate Seeded with Diamond and Different Ratios of SiC Powders
by: Mas Ayu, Hassan, et al.
Published: (2014)

Enhanced reliability by diamond-like carbon in single-layer organic light emitting diodes
by: Yap, S.-S., et al.
Published: (2006)

Structural properties of amorphous diamond-like carbon: percolation, cluster, and pair correlation analysis
by: Kowalczyk, Piotr, et al.
Published: (2012)

Direct electrochemical response of glucose at nickel-doped diamond like carbon thin film electrodes
by: Yang, G.C., et al.
Published: (2009)

Penyediaan dan pencirian saput tipis SnSe berorientasi tunggal
by: Sakrani, Samsudi
Published: (1996)

Multilevel Computational Analysis of Fluorocarbon Polyatomic Deposition on Diamond
by: Devine, B., et al.
Published: (2010)

Seedling survival in a northern temperate forest understory in increased by elevated atmospheric carbon dioxide and atmospheric nitrogen deposition
by: Sefcik, Lesley, et al.
Published: (2007)

Kajian mengenai semikonduktor berasaskan karbon / silikon direka menggunakan DC-PECVD
by: Muhammad, Rosnita

Robust nonlinear regression: case study for modeling the greenhouse gases, methane and carbon dioxide concentration in atmosphere
by: Riazoshams, Hossein, et al.
Published: (2014)

Structural properties of deposited ZnO thin films on flexible substrates at various substrate temperatures and RF power
by: Muhamad Suki, Nur Sa'adah, et al.
Published: (2012)

Characterization of a-CNx Thin Films prepared by RF-PECVD Technique for humidity sensor
by: R. Awang,, et al.
Published: (2017)

Electrophoretic deposition of carbon nanotubes onto zinc substrates for electrode applications
by: Napapon Massa-Angkul,, et al.
Published: (2020)

Tribological analysis of diamond-like carbon coatings in combination with bio-lubricants for engine cam tappet interaction / Rehan Zahid
by: Rehan , Zahid
Published: (2017)

Filtered pulsed cathodic arc deposition of fullerene-like carbon and carbon nitride films
by: Tucker, Mark, et al.
Published: (2014)

Structural properties of hydrogenated amorphous silicon (A-SI:H) thin film grown via radio frequency plasma enhanced chemical vapor deposition (RF PECVD)
by: Anthony Hasbi, Hasbullah
Published: (2005)

Nano-structured diamond & silica coatings on CO-CR-MO substrate for biomedical application
by: Kumaran, Kadirgama, et al.

The effect of like-charge attraction on aerosol growth in the atmosphere of Titan
by: Lindgren, Eric B., et al.
Published: (2016)

Controlled deposition and utilization of carbon on Ni-YSZ anodes of SOFCs operating on dry methane
by: Jiao, Y., et al.
Published: (2016)

Exploring The Validity Of The Charged Cluster Model For Chemical Vapour Deposition Diamond Growth.
by: Saw, K.G.
Published: (2004)

Exploring the validity of the charged cluster model for chemical vapour deposition diamond growth.
by: K., G Saw
Published: (2004)

Diamond
by: Parfitt, Mark
Published: (2009)

Coal-derived rates of atmospheric dust deposition during the Permian
by: Marshall, Chris, et al.
Published: (2016)

Numerical modelling of microwave plasma-assisted chemical vapour deposition reactors for diamond synthesis
by: Marsh, Jonathan
Published: (2020)

Methane combustion in MILD oxyfuel regime: influences of dilution atmosphere in co-flow configuration
by: Chen, Sheng, et al.
Published: (2017)

Experimental investigation of tribological properties of laser textured tungsten doped diamond like carbon coating under dry sliding conditions at various loads
by: Arslan, Ahmed, et al.
Published: (2019)

Experimental investigation of tribological properties of laser textured tungsten doped diamond like carbon coating under dry sliding conditions at various loads
by: Arslan, A., et al.
Published: (2019)

Influence of mixed convection in atmospheric pressure chemical vapor deposition of graphene growth
by: Fauzi, Fatin Bazilah, et al.
Published: (2019)