A review on the morphology of daimond thin film coating on various types of substrate materials

Diamond coatings are employed to yield significant benefits in applications such as for cutting tools, optical lenses, biomedical components, microelectronics, engineering, and thermal management systems. However, several process parameters must be studied to get optimum coating and eliminated disa...

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Main Authors: Hamzah, Esah, Purniawan, Agung, Mohd. Toff, Mohd. Radzi
Format: Article
Language:English
Published: Faculty of Mechanical Engineering 2006
Subjects:
Online Access:http://eprints.utm.my/8124/
http://eprints.utm.my/8124/1/8124.pdf
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author Hamzah, Esah
Purniawan, Agung
Mohd. Toff, Mohd. Radzi
author_facet Hamzah, Esah
Purniawan, Agung
Mohd. Toff, Mohd. Radzi
author_sort Hamzah, Esah
building UTeM Institutional Repository
collection Online Access
description Diamond coatings are employed to yield significant benefits in applications such as for cutting tools, optical lenses, biomedical components, microelectronics, engineering, and thermal management systems. However, several process parameters must be studied to get optimum coating and eliminated disadvantages results. Chemical Vapor Deposition (CVD) technique is commonly used for diamond coating. This paper reports on investigations in the last few years on CVD process and problems associated with it such as gas mixture, substrate materials and coating adhesion. Emphasis is given to achieve process optimization by selection of substrate material and process parameter is controlled to obtain high quality morphology of thin film diamond coating. Some materials are suitable substrate for diamond nucleation and growth. Increase in substrate temperature and %CH4 in H2 in gas mixture can cause an increase in the nucleation and crystal growth rate and grain size, but the diamond quality will be reduced. Whereas increase in reactor pressure will decrease crystal growth but the diamond quality will be improved. Structure and morphology were investigated by Scanning Electron Microscopy (SEM) and diamond thin film quality by Raman Spectra.
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spelling utm-81242010-06-02T01:51:48Z http://eprints.utm.my/8124/ A review on the morphology of daimond thin film coating on various types of substrate materials Hamzah, Esah Purniawan, Agung Mohd. Toff, Mohd. Radzi TJ Mechanical engineering and machinery Diamond coatings are employed to yield significant benefits in applications such as for cutting tools, optical lenses, biomedical components, microelectronics, engineering, and thermal management systems. However, several process parameters must be studied to get optimum coating and eliminated disadvantages results. Chemical Vapor Deposition (CVD) technique is commonly used for diamond coating. This paper reports on investigations in the last few years on CVD process and problems associated with it such as gas mixture, substrate materials and coating adhesion. Emphasis is given to achieve process optimization by selection of substrate material and process parameter is controlled to obtain high quality morphology of thin film diamond coating. Some materials are suitable substrate for diamond nucleation and growth. Increase in substrate temperature and %CH4 in H2 in gas mixture can cause an increase in the nucleation and crystal growth rate and grain size, but the diamond quality will be reduced. Whereas increase in reactor pressure will decrease crystal growth but the diamond quality will be improved. Structure and morphology were investigated by Scanning Electron Microscopy (SEM) and diamond thin film quality by Raman Spectra. Faculty of Mechanical Engineering 2006 Article PeerReviewed application/pdf en http://eprints.utm.my/8124/1/8124.pdf Hamzah, Esah and Purniawan, Agung and Mohd. Toff, Mohd. Radzi (2006) A review on the morphology of daimond thin film coating on various types of substrate materials. Jurnal Mekanikal (21). pp. 16-26. ISSN 0127-3396 http://www.fkm.utm.my/~mekanika/journal.html
spellingShingle TJ Mechanical engineering and machinery
Hamzah, Esah
Purniawan, Agung
Mohd. Toff, Mohd. Radzi
A review on the morphology of daimond thin film coating on various types of substrate materials
title A review on the morphology of daimond thin film coating on various types of substrate materials
title_full A review on the morphology of daimond thin film coating on various types of substrate materials
title_fullStr A review on the morphology of daimond thin film coating on various types of substrate materials
title_full_unstemmed A review on the morphology of daimond thin film coating on various types of substrate materials
title_short A review on the morphology of daimond thin film coating on various types of substrate materials
title_sort review on the morphology of daimond thin film coating on various types of substrate materials
topic TJ Mechanical engineering and machinery
url http://eprints.utm.my/8124/
http://eprints.utm.my/8124/
http://eprints.utm.my/8124/1/8124.pdf