Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique

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Deposition and characterization of TiN-coated steels at various N 2 gas flow rates with constant etching by using capvd technique

Cathodic Arc Physical Vapor Deposition (CAPVD), a technique used for the deposition of hard coatings, for tooling applications, has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher morphology. Constant etc...

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Bibliographic Details
Main Authors:	Ali, Mubarak, Hamzah, Esah, Mohd Toff, Mohd Radzi
Format:	Article
Published:	World Scientific 2007
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/7696/

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