Venkatesh, V. C., Sudin, I., & Mahadevan, S. C. (2004). Electro-chemical mechanical polishing of copper and chemical mechanical polishing of glass. Elsevier B.V.
Chicago Style (17th ed.) CitationVenkatesh, Vasisht C., Izman Sudin, and S. C. Mahadevan. Electro-chemical Mechanical Polishing of Copper and Chemical Mechanical Polishing of Glass. Elsevier B.V, 2004.
MLA (9th ed.) CitationVenkatesh, Vasisht C., et al. Electro-chemical Mechanical Polishing of Copper and Chemical Mechanical Polishing of Glass. Elsevier B.V, 2004.
Warning: These citations may not always be 100% accurate.