Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films

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Macrodroplet reduction and growth mechanisms in cathodic arc physical vapor deposition of TiN films

Cathodic arc physical vapor deposition (CAPVD) a technique used for the deposition of hard coatings for tooling applications has many advantages. The main drawback of this technique is the formation of macrodroplets (MDs) during deposition resulting in films with rougher morphology. The MDs contamin...

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Bibliographic Details
Main Authors:	Ali, M., Hamzah, E., Abbas, T., Mohd Toff, M.R.H., Qazi, I.A.
Format:	Article
Published:	World Scientific Publishing Co 2008
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utm.my/7021/

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