Study of macrodroplet and growth mechanisms with and without ion etchings on the properties of TiN coatings deposited on HSS using cathodic arc physical vapour deposition technique

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Study of macrodroplet and growth mechanisms with and without ion etchings on the properties of TiN coatings deposited on HSS using cathodic arc physical vapour deposition technique

In the present study, titanium nitride (TiN) films were deposited on high-speed steel (HSS) by using cathodic arc physical vapour deposition (CAPVD) technique. The main drawback of this technique, however, is the formation of macrodroplets (MDs) during deposition, resulting in films with rougher mor...

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Bibliographic Details
Main Authors:	Mubarak, A., Hamzah, E., M. R. M., Toff
Format:	Article
Published:	Elsevier B V 2008
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utm.my/6848/

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