The effect of thickness on ZnO thin film CO gas sensor

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The effect of thickness on ZnO thin film CO gas sensor

Rf magnetron sputtering system were using to deposited ZnO thin films onto corning substrates as a CO gas sensor. The sensing properties of the thin film thickness on CO gas was investigated. The film thickness was varied by controlling the deposition time.The CO gas sensing properties were dete...

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Bibliographic Details
Main Authors:	Ismail, Yazid Abdul Manakar, Md. Yusuf, Mohd. Nor, Wan Shamsuri, Wan Nurulhuda, Wahab, Yusof, Othaman, Zulkafli
Format:	Article
Language:	English English
Published:	Ibnu Sina Institute for Fundamental Science Studies, UTM 2006
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/6828/ http://eprints.utm.my/6828/1/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.doc http://eprints.utm.my/6828/2/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.pdf

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