The effect of thickness on ZnO thin film CO gas sensor
Rf magnetron sputtering system were using to deposited ZnO thin films onto corning substrates as a CO gas sensor. The sensing properties of the thin film thickness on CO gas was investigated. The film thickness was varied by controlling the deposition time.The CO gas sensing properties were dete...
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| Format: | Article |
| Language: | English English |
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Ibnu Sina Institute for Fundamental Science Studies, UTM
2006
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| Online Access: | http://eprints.utm.my/6828/ http://eprints.utm.my/6828/1/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.doc http://eprints.utm.my/6828/2/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.pdf |
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| author | Ismail, Yazid Abdul Manakar Md. Yusuf, Mohd. Nor Wan Shamsuri, Wan Nurulhuda Wahab, Yusof Othaman, Zulkafli |
| author_facet | Ismail, Yazid Abdul Manakar Md. Yusuf, Mohd. Nor Wan Shamsuri, Wan Nurulhuda Wahab, Yusof Othaman, Zulkafli |
| author_sort | Ismail, Yazid Abdul Manakar |
| building | UTeM Institutional Repository |
| collection | Online Access |
| description | Rf magnetron sputtering system were using to deposited ZnO thin films onto corning substrates as a CO gas sensor. The sensing properties of the thin film thickness on CO gas was investigated. The film thickness was varied by controlling the deposition time.The CO gas sensing properties were determined by in situ measurement for surface resistance of the thin film as a function of film thickness, operating temperature and various CO concentrations. The gas sensitivity of ZnO gas sensor depends upon its grain size. |
| first_indexed | 2025-11-15T20:56:39Z |
| format | Article |
| id | utm-6828 |
| institution | Universiti Teknologi Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-15T20:56:39Z |
| publishDate | 2006 |
| publisher | Ibnu Sina Institute for Fundamental Science Studies, UTM |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | utm-68282017-10-22T06:11:23Z http://eprints.utm.my/6828/ The effect of thickness on ZnO thin film CO gas sensor Ismail, Yazid Abdul Manakar Md. Yusuf, Mohd. Nor Wan Shamsuri, Wan Nurulhuda Wahab, Yusof Othaman, Zulkafli QC Physics Rf magnetron sputtering system were using to deposited ZnO thin films onto corning substrates as a CO gas sensor. The sensing properties of the thin film thickness on CO gas was investigated. The film thickness was varied by controlling the deposition time.The CO gas sensing properties were determined by in situ measurement for surface resistance of the thin film as a function of film thickness, operating temperature and various CO concentrations. The gas sensitivity of ZnO gas sensor depends upon its grain size. Ibnu Sina Institute for Fundamental Science Studies, UTM 2006 Article PeerReviewed application/msword en http://eprints.utm.my/6828/1/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.doc application/pdf en http://eprints.utm.my/6828/2/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.pdf Ismail, Yazid Abdul Manakar and Md. Yusuf, Mohd. Nor and Wan Shamsuri, Wan Nurulhuda and Wahab, Yusof and Othaman, Zulkafli (2006) The effect of thickness on ZnO thin film CO gas sensor. The Proceedings of Regional Annual Fundamental Science Seminar (RAFSS) 2006 . pp. 89-94. |
| spellingShingle | QC Physics Ismail, Yazid Abdul Manakar Md. Yusuf, Mohd. Nor Wan Shamsuri, Wan Nurulhuda Wahab, Yusof Othaman, Zulkafli The effect of thickness on ZnO thin film CO gas sensor |
| title | The effect of thickness on ZnO thin film CO gas sensor |
| title_full | The effect of thickness on ZnO thin film CO gas sensor |
| title_fullStr | The effect of thickness on ZnO thin film CO gas sensor |
| title_full_unstemmed | The effect of thickness on ZnO thin film CO gas sensor |
| title_short | The effect of thickness on ZnO thin film CO gas sensor |
| title_sort | effect of thickness on zno thin film co gas sensor |
| topic | QC Physics |
| url | http://eprints.utm.my/6828/ http://eprints.utm.my/6828/1/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.doc http://eprints.utm.my/6828/2/The_Effect_Of_Thickness_On_ZnO_Thin_Film_CO_Gas_Sensor.pdf |