Precision micro-machining of silicon and glass

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Precision micro-machining of silicon and glass

This research work is concentrated on machining of flat surfaces on silicon and glass for applications like IC chips and small optical lenses. Aspheric surfaces were also generated on silicon and germanium. Grinding was done to give a good surface finish and at the same time focused on getting the m...

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Bibliographic Details
Main Authors:	Venkatesh, V. C., Izman, S., Sharif, S., Mon, T. T., Konneh, M.
Format:	Article
Published:	2002
Subjects:	TJ Mechanical engineering and machinery
Online Access:	http://eprints.utm.my/6754/

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