Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)

This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveg...

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Main Authors: Shee, Yu Gang, Mohd. Kassim, Norazan, Mohammad, Abu Bakar, Ibrahim, Mohd. Haniff
Format: Book Section
Language:English
Published: IEEE 2004
Subjects:
Online Access:http://eprints.utm.my/6214/
http://eprints.utm.my/6214/1/01620940.pdf
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author Shee, Yu Gang
Mohd. Kassim, Norazan
Mohammad, Abu Bakar
Ibrahim, Mohd. Haniff
author_facet Shee, Yu Gang
Mohd. Kassim, Norazan
Mohammad, Abu Bakar
Ibrahim, Mohd. Haniff
author_sort Shee, Yu Gang
building UTeM Institutional Repository
collection Online Access
description This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented.
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format Book Section
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institution Universiti Teknologi Malaysia
institution_category Local University
language English
last_indexed 2025-11-15T20:54:28Z
publishDate 2004
publisher IEEE
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spelling utm-62142011-03-15T05:03:58Z http://eprints.utm.my/6214/ Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB) Shee, Yu Gang Mohd. Kassim, Norazan Mohammad, Abu Bakar Ibrahim, Mohd. Haniff TK Electrical engineering. Electronics Nuclear engineering This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented. IEEE 2004-12-07 Book Section PeerReviewed application/pdf en http://eprints.utm.my/6214/1/01620940.pdf Shee, Yu Gang and Mohd. Kassim, Norazan and Mohammad, Abu Bakar and Ibrahim, Mohd. Haniff (2004) Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB). In: Proceedings 2004 IEEE International Conference on Semiconductor Electronics. IEEE, USA, pp. 522-526. ISBN 0-7803-8658-2 http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1620940 10.1109/SMELEC.2004.1620940
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
Shee, Yu Gang
Mohd. Kassim, Norazan
Mohammad, Abu Bakar
Ibrahim, Mohd. Haniff
Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
title Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
title_full Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
title_fullStr Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
title_full_unstemmed Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
title_short Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
title_sort fabrication of polymeric optical waveguides by b-staged bisbenzocyclobutene(bcb)
topic TK Electrical engineering. Electronics Nuclear engineering
url http://eprints.utm.my/6214/
http://eprints.utm.my/6214/
http://eprints.utm.my/6214/
http://eprints.utm.my/6214/1/01620940.pdf