Fabrication of polymeric optical waveguides by B-Staged Bisbenzocyclobutene(BCB)
This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveg...
| Main Authors: | , , , |
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| Format: | Book Section |
| Language: | English |
| Published: |
IEEE
2004
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| Subjects: | |
| Online Access: | http://eprints.utm.my/6214/ http://eprints.utm.my/6214/1/01620940.pdf |
| Summary: | This paper reports the fabrication of polymeric optical waveguides. Single mode planar slab waveguides and straight waveguides had been fabricated from the organic polymer B-staged bisbenzoeyclobutene (BCB) from DOWO Chemical. A low cost fabrication method, chemical etching is used to form the waveguides on BK7 glass substrates. The processing conditions required for the fabrication of single mode optical waveguides are presented. |
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