Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system

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Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system

Carbon nanotubes (CNTs) have been receiving much attention for a wide variety of applications due to their unique electronic and mechanical properties. The plasma enhanced chemical vapour deposition (PECVD) method to synthesis carbon nanotubes (CNTs) is considered as an efficient production method o...

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Bibliographic Details
Main Authors:	Saidin, M. A. R., Ismail, Ahmad Fauzi, Aziz, M.
Format:	Conference or Workshop Item
Language:	English
Published:	2007
Subjects:	T Technology (General)
Online Access:	http://eprints.utm.my/5515/ http://eprints.utm.my/5515/1/M.A.R.Saidin2007_OptimizationOfHome-BuiltPlasma_.pdf

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