Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system
Carbon nanotubes (CNTs) have been receiving much attention for a wide variety of applications due to their unique electronic and mechanical properties. The plasma enhanced chemical vapour deposition (PECVD) method to synthesis carbon nanotubes (CNTs) is considered as an efficient production method o...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2007
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| Online Access: | http://eprints.utm.my/5515/ http://eprints.utm.my/5515/1/M.A.R.Saidin2007_OptimizationOfHome-BuiltPlasma_.pdf |
| _version_ | 1848891071564611584 |
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| author | Saidin, M. A. R. Ismail, Ahmad Fauzi Aziz, M. |
| author_facet | Saidin, M. A. R. Ismail, Ahmad Fauzi Aziz, M. |
| author_sort | Saidin, M. A. R. |
| building | UTeM Institutional Repository |
| collection | Online Access |
| description | Carbon nanotubes (CNTs) have been receiving much attention for a wide variety of applications due to their unique electronic and mechanical properties. The plasma enhanced chemical vapour deposition (PECVD) method to synthesis carbon nanotubes (CNTs) is considered as an efficient production method of great technologically interest. The objective of this study is to optimize the operating parameters for the system. In this work, PECVD system has been design and built for the synthesis of CNTs. The different intensity of plasma can be generated by varying the flow rates and voltage. The operating parameters have been optimised to enable the growth of carbonaceous materials. The results obtained showed that the voltage between 100-450V and gas mixtures for precursor and carrier gases used in a ratio between 1:2 and 1:4 are able to produce good material. |
| first_indexed | 2025-11-15T20:52:08Z |
| format | Conference or Workshop Item |
| id | utm-5515 |
| institution | Universiti Teknologi Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T20:52:08Z |
| publishDate | 2007 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | utm-55152017-08-30T00:48:33Z http://eprints.utm.my/5515/ Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system Saidin, M. A. R. Ismail, Ahmad Fauzi Aziz, M. T Technology (General) Carbon nanotubes (CNTs) have been receiving much attention for a wide variety of applications due to their unique electronic and mechanical properties. The plasma enhanced chemical vapour deposition (PECVD) method to synthesis carbon nanotubes (CNTs) is considered as an efficient production method of great technologically interest. The objective of this study is to optimize the operating parameters for the system. In this work, PECVD system has been design and built for the synthesis of CNTs. The different intensity of plasma can be generated by varying the flow rates and voltage. The operating parameters have been optimised to enable the growth of carbonaceous materials. The results obtained showed that the voltage between 100-450V and gas mixtures for precursor and carrier gases used in a ratio between 1:2 and 1:4 are able to produce good material. 2007 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utm.my/5515/1/M.A.R.Saidin2007_OptimizationOfHome-BuiltPlasma_.pdf Saidin, M. A. R. and Ismail, Ahmad Fauzi and Aziz, M. (2007) Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system. In: The 23rd Regional Conference On Solid State Science and Technology 2007, 27-29 November 2007, Hyatt Regency Hotel, Johor Bahru, Malaysia. |
| spellingShingle | T Technology (General) Saidin, M. A. R. Ismail, Ahmad Fauzi Aziz, M. Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system |
| title | Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system |
| title_full | Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system |
| title_fullStr | Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system |
| title_full_unstemmed | Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system |
| title_short | Optimization of home-built plasma enhanced chemical vapour deposition (PECVD) system |
| title_sort | optimization of home-built plasma enhanced chemical vapour deposition (pecvd) system |
| topic | T Technology (General) |
| url | http://eprints.utm.my/5515/ http://eprints.utm.my/5515/1/M.A.R.Saidin2007_OptimizationOfHome-BuiltPlasma_.pdf |