Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
This paper describes about the experience of Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) establishing the Micro Fabrication Cleanroom (MFC). This facility is mainly designed for teaching undergraduate microelectronic course leading to a Bachelor’s degree. With the construction of its “M...
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| Format: | Article |
| Language: | English |
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Faculty of Electrical Engineering
2006
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| Subjects: | |
| Online Access: | http://eprints.utm.my/54/ http://eprints.utm.my/54/1/paper8dec06.pdf |
| _version_ | 1848889838087962624 |
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| author | Hashim, Uda Zahid Jamal, Zul Azhar Phang, K. C. Nurzaihan, Mohamad Abdul Halim, Nurhamidah Abd Razak, Haffiz |
| author_facet | Hashim, Uda Zahid Jamal, Zul Azhar Phang, K. C. Nurzaihan, Mohamad Abdul Halim, Nurhamidah Abd Razak, Haffiz |
| author_sort | Hashim, Uda |
| building | UTeM Institutional Repository |
| collection | Online Access |
| description | This paper describes about the experience of Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) establishing the Micro Fabrication Cleanroom (MFC). This facility is mainly designed for teaching undergraduate microelectronic course leading to a Bachelor’s degree. With the construction of its “Micro Fabrication Cleanroomâ€? (MFC), KUKUM has set the vision to reverse our reliance on imported technologies, as well as spearhead and support human resources needed by our nation, at the same time promoting indigenous talents and professionals especially in the field of microelectronic engineering. The cleanroom is approximately 115m2 with cleanliness class from ISO Class 5 in the Yellow Room to ISO Class 8 in the Grey Area (Utility Chase). The cleanroom are equipped with distributed process gases such as purified nitrogen, oxygen and compressed dry air and 18.0Mï?—ï€ ï€ ultra-pure water system supplied to the three fume hoods. Exhaust air from the fume hood are exhausted to the laboratory scrubber system for treatment. Despite being a teaching facility, the MFC cleanroom was designed and specified to ISO Class 5 cleanroom standard, and provided with features such as air shower, talk- through and pass box usually found in commercial facilities, it is our intention to expose and teach students to appreciate the stringent cleanroom protocols, in addition to the formal course works. This paper also describes the specifications, designs, development, testing, commissioning and operation of the cleanroom.
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| first_indexed | 2025-11-15T20:32:32Z |
| format | Article |
| id | utm-54 |
| institution | Universiti Teknologi Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T20:32:32Z |
| publishDate | 2006 |
| publisher | Faculty of Electrical Engineering |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | utm-542017-10-08T04:14:11Z http://eprints.utm.my/54/ Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate Hashim, Uda Zahid Jamal, Zul Azhar Phang, K. C. Nurzaihan, Mohamad Abdul Halim, Nurhamidah Abd Razak, Haffiz TK Electrical engineering. Electronics Nuclear engineering This paper describes about the experience of Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) establishing the Micro Fabrication Cleanroom (MFC). This facility is mainly designed for teaching undergraduate microelectronic course leading to a Bachelor’s degree. With the construction of its “Micro Fabrication Cleanroomâ€? (MFC), KUKUM has set the vision to reverse our reliance on imported technologies, as well as spearhead and support human resources needed by our nation, at the same time promoting indigenous talents and professionals especially in the field of microelectronic engineering. The cleanroom is approximately 115m2 with cleanliness class from ISO Class 5 in the Yellow Room to ISO Class 8 in the Grey Area (Utility Chase). The cleanroom are equipped with distributed process gases such as purified nitrogen, oxygen and compressed dry air and 18.0Mï?—ï€ ï€ ultra-pure water system supplied to the three fume hoods. Exhaust air from the fume hood are exhausted to the laboratory scrubber system for treatment. Despite being a teaching facility, the MFC cleanroom was designed and specified to ISO Class 5 cleanroom standard, and provided with features such as air shower, talk- through and pass box usually found in commercial facilities, it is our intention to expose and teach students to appreciate the stringent cleanroom protocols, in addition to the formal course works. This paper also describes the specifications, designs, development, testing, commissioning and operation of the cleanroom. Faculty of Electrical Engineering 2006 Article PeerReviewed application/pdf en http://eprints.utm.my/54/1/paper8dec06.pdf Hashim, Uda and Zahid Jamal, Zul Azhar and Phang, K. C. and Nurzaihan, Mohamad and Abdul Halim, Nurhamidah and Abd Razak, Haffiz (2006) Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate. Elektrika, 8 (2). pp. 46-53. ISSN 0128-4428 http://fke.utm.my/elektrika/dec06/paper8dec06.pdf |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Hashim, Uda Zahid Jamal, Zul Azhar Phang, K. C. Nurzaihan, Mohamad Abdul Halim, Nurhamidah Abd Razak, Haffiz Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate |
| title | Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
|
| title_full | Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
|
| title_fullStr | Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
|
| title_full_unstemmed | Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
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| title_short | Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
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| title_sort | design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://eprints.utm.my/54/ http://eprints.utm.my/54/ http://eprints.utm.my/54/1/paper8dec06.pdf |