Simulasi suis optik menggunakan teknologi MEMs

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Simulasi suis optik menggunakan teknologi MEMs

MEMs or known as MicroElectromechanical System is first introduced in 1980s. This technology is a combination of sensors, mechanical and electronic elements. All of them are unite in single basic material (silicon) and fabricated using a micro-fabrication system. Two micro fabrication techniques are...

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Bibliographic Details
Main Author:	Adon, Mohamad Nazib
Format:	Thesis
Language:	English
Published:	2006
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/1384/ http://eprints.utm.my/1384/1/MohamadNazibAdonMFKE2006.pdf

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