Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique

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Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique

Silicon nitride based planar waveguides play an important role in biosensing applications. Conventional fabrication of silicon nitride waveguides utilizes the chemical vapor deposition (CVD) technologies. Silicon nitride waveguide abrication through magnetron sputtering is still unexplored and a few...

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Bibliographic Details
Main Author:	Majeed, Uzair
Format:	Thesis
Language:	English English English
Published:	2016
Subjects:	TP200-248 Chemicals: Manufacture, use, etc.
Online Access:	http://eprints.uthm.edu.my/812/ http://eprints.uthm.edu.my/812/1/24p%20UZAIR%20MAJEED.pdf http://eprints.uthm.edu.my/812/2/UZAIR%20MAJEED%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/812/3/UZAIR%20MAJEED%20WATERMARK.pdf

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