Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique

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Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique

This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The charac...

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Bibliographic Details
Main Author:	Morsin, Marlia
Format:	Thesis
Language:	English English English
Published:	2004
Subjects:	TK Electrical engineering. Electronics Nuclear engineering TK7800-8360 Electronics
Online Access:	http://eprints.uthm.edu.my/7661/ http://eprints.uthm.edu.my/7661/1/24p%20MARLIA%20MORSIN.pdf http://eprints.uthm.edu.my/7661/2/MARLIA%20MORSIN%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/7661/3/MARLIA%20MORSIN%20WATERMARK.pdf

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