A review: properties of silicon carbide materials in MEMS application

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A review: properties of silicon carbide materials in MEMS application

The paper presents the review properties of silicon carbide materials in the MEMS application. The study aims to explore silicon carbide in MEMS technology which considers the development of microscale and integrated devices that combine electronics, electrical and mechanical elements. MEMS has beco...

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Bibliographic Details
Main Authors:	Marsi, Noraini, Majlis, Burhanuddin Yeop, Mohd Yasin, Faisal, Zainal Abidin, Hafzaliza Erny, Hamzah, Azrul Azlan
Format:	Article
Language:	English
Published:	UNIMAP 2020
Subjects:	TP250-261 Industrial electrochemistry
Online Access:	http://eprints.uthm.edu.my/6333/ http://eprints.uthm.edu.my/6333/1/AJ%202020%20%28814%29.pdf

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