Nanofabrication process by reactive ion etching of polystyrene nanosphere on silicon surface

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Nanofabrication process by reactive ion etching of polystyrene nanosphere on silicon surface

Nanospheres made of organic polymer have been applied to generate various patterning mask in fabricating functional nanostructures. The patterning and generation of semiconductor nanostructures through nanospheres mask provides a potential alternative to the conventional top-down fabrication techniq...

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Bibliographic Details
Main Authors:	Yabagi, Jibrin Alhaji, Kimpa, Mohammed Isah, Muhammad, Muhammad Nmaya, Nayan, Nafarizal, Embong, Zaidi, Agam, Mohd Arif
Format:	Article
Language:	English
Published:	UTHM Publisher 2017
Subjects:	T Technology (General) TA401-492 Materials of engineering and construction. Mechanics of materials
Online Access:	http://eprints.uthm.edu.my/4852/ http://eprints.uthm.edu.my/4852/1/AJ%202017%20%28674%29.pdf

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