Investigation of intermediate layer for Ag/Si metal-semiconductor contacts

The intermediate layer is a crucial component in thin film metal contacts. In determining Ohmic characteristics, selection of materials used as metal contact can affect device performance. However, in determine a good electrical conductor, it depends on their physical structure which is formed by mo...

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Main Author: Bahri, Bibi Zulaika
Format: Thesis
Language:English
English
English
Published: 2019
Subjects:
Online Access:http://eprints.uthm.edu.my/478/
http://eprints.uthm.edu.my/478/1/24p%20BIBI%20ZULAIKA%20BAHRI.pdf
http://eprints.uthm.edu.my/478/2/BIBI%20ZULAIKA%20COPYRIGHT%20DECLARATION.pdf
http://eprints.uthm.edu.my/478/3/BIBI%20ZULAIKA%20BHARI%20WATERMARK.pdf
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author Bahri, Bibi Zulaika
author_facet Bahri, Bibi Zulaika
author_sort Bahri, Bibi Zulaika
building UTHM Institutional Repository
collection Online Access
description The intermediate layer is a crucial component in thin film metal contacts. In determining Ohmic characteristics, selection of materials used as metal contact can affect device performance. However, in determine a good electrical conductor, it depends on their physical structure which is formed by movement of free electron, thus affect the electrical properties. Yet, there are challenges in applying metal contact due to amorphous characteristic and in order to improve the quality of films, Nd:YAG laser were used as structural treatment. The thickness of top Ag layer is kept constant with different intermediate layer applied onto substrate.The characterizations were investigated by atomic force microscopy (AFM), four point probe (FPP) measurement and ultraviolet-visible spectroscopy (UV-Vis). The result indicates the RMS roughness was changed with the deposition time. The surface of Pt/Ag becomes rougher as deposition time increases. As deposition time increases, the resistivity shows some decrement. However, the fluctuated of resistivity may due to surface roughness scattering mechanism. The lowest resistivity was 6.29 × 10-3 Ω-cm deposited at 120 s. The calculated band gap was obtained as ~2.1-3.0 eV at different deposition time. The morphology of Au/Ag shows the improvement of laser treatment. RMS roughness was decreased with increment of deposition time. Deposition time by 120 s shows the smoother in small size of grain, which indicated the lowest resistivity with 4.26 × 10-4 Ω-cm. The calculated band gap was obtained as ~2.4-2.9 eV at different deposition time. For Pd/Ag, the treatment may alter the morphology of films. RMS roughness was changed with the deposition time. The surface becomes rougher as deposition time increases. This due to thickness of layer contains a higher concentration, but might crack and retard carrier mobility. The fluctuated of resistivity may due to scattering, which negative charge and potential barrier increase. The lowest resistivity was 4.10 × 10-3 Ω-cm deposited at 100 s. The calculated band gap was obtained as ~2.1-2.7 eV at different deposition time. As a conclusion, Au shows the better intermediate layer and has a good metal contact properties compared to Pt and Pd metal.
first_indexed 2025-11-15T19:50:41Z
format Thesis
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institution Universiti Tun Hussein Onn Malaysia
institution_category Local University
language English
English
English
last_indexed 2025-11-15T19:50:41Z
publishDate 2019
recordtype eprints
repository_type Digital Repository
spelling uthm-4782021-07-25T07:02:51Z http://eprints.uthm.edu.my/478/ Investigation of intermediate layer for Ag/Si metal-semiconductor contacts Bahri, Bibi Zulaika QC501-766 Electricity and magnetism The intermediate layer is a crucial component in thin film metal contacts. In determining Ohmic characteristics, selection of materials used as metal contact can affect device performance. However, in determine a good electrical conductor, it depends on their physical structure which is formed by movement of free electron, thus affect the electrical properties. Yet, there are challenges in applying metal contact due to amorphous characteristic and in order to improve the quality of films, Nd:YAG laser were used as structural treatment. The thickness of top Ag layer is kept constant with different intermediate layer applied onto substrate.The characterizations were investigated by atomic force microscopy (AFM), four point probe (FPP) measurement and ultraviolet-visible spectroscopy (UV-Vis). The result indicates the RMS roughness was changed with the deposition time. The surface of Pt/Ag becomes rougher as deposition time increases. As deposition time increases, the resistivity shows some decrement. However, the fluctuated of resistivity may due to surface roughness scattering mechanism. The lowest resistivity was 6.29 × 10-3 Ω-cm deposited at 120 s. The calculated band gap was obtained as ~2.1-3.0 eV at different deposition time. The morphology of Au/Ag shows the improvement of laser treatment. RMS roughness was decreased with increment of deposition time. Deposition time by 120 s shows the smoother in small size of grain, which indicated the lowest resistivity with 4.26 × 10-4 Ω-cm. The calculated band gap was obtained as ~2.4-2.9 eV at different deposition time. For Pd/Ag, the treatment may alter the morphology of films. RMS roughness was changed with the deposition time. The surface becomes rougher as deposition time increases. This due to thickness of layer contains a higher concentration, but might crack and retard carrier mobility. The fluctuated of resistivity may due to scattering, which negative charge and potential barrier increase. The lowest resistivity was 4.10 × 10-3 Ω-cm deposited at 100 s. The calculated band gap was obtained as ~2.1-2.7 eV at different deposition time. As a conclusion, Au shows the better intermediate layer and has a good metal contact properties compared to Pt and Pd metal. 2019-09 Thesis NonPeerReviewed text en http://eprints.uthm.edu.my/478/1/24p%20BIBI%20ZULAIKA%20BAHRI.pdf text en http://eprints.uthm.edu.my/478/2/BIBI%20ZULAIKA%20COPYRIGHT%20DECLARATION.pdf text en http://eprints.uthm.edu.my/478/3/BIBI%20ZULAIKA%20BHARI%20WATERMARK.pdf Bahri, Bibi Zulaika (2019) Investigation of intermediate layer for Ag/Si metal-semiconductor contacts. Masters thesis, Universiti Tun Hussein Onn Malaysia.
spellingShingle QC501-766 Electricity and magnetism
Bahri, Bibi Zulaika
Investigation of intermediate layer for Ag/Si metal-semiconductor contacts
title Investigation of intermediate layer for Ag/Si metal-semiconductor contacts
title_full Investigation of intermediate layer for Ag/Si metal-semiconductor contacts
title_fullStr Investigation of intermediate layer for Ag/Si metal-semiconductor contacts
title_full_unstemmed Investigation of intermediate layer for Ag/Si metal-semiconductor contacts
title_short Investigation of intermediate layer for Ag/Si metal-semiconductor contacts
title_sort investigation of intermediate layer for ag/si metal-semiconductor contacts
topic QC501-766 Electricity and magnetism
url http://eprints.uthm.edu.my/478/
http://eprints.uthm.edu.my/478/1/24p%20BIBI%20ZULAIKA%20BAHRI.pdf
http://eprints.uthm.edu.my/478/2/BIBI%20ZULAIKA%20COPYRIGHT%20DECLARATION.pdf
http://eprints.uthm.edu.my/478/3/BIBI%20ZULAIKA%20BHARI%20WATERMARK.pdf