Improved resistivity and surface morphology of laser treated Cr/Pd metal contact sputter deposited on Si

Improved resistivity and surface morphology of laser treated Cr/Pd metal contact sputter deposited on Si

In this paper Cr/Pd metal contacts were deposited on Si by using DC magnetron sputtering. The metal contacts were treated using infrared Nd:YAG pulsed laser at different laser pulse energy. The metal contacts were characterized based on electrical, optical and morphology properties by using four-poi...

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Bibliographic Details
Main Authors: Ahmad, Rabiatul Adawiah, Ali, Ahmad Hadi, Isiyaku, Aliyu Kabiru, Bhari, Bibi Zulaika
Format: Article
Language:English
Published: UTHM Publisher 2017
Subjects:
TN600-799 Metallurgy
Online Access:http://eprints.uthm.edu.my/4757/
http://eprints.uthm.edu.my/4757/1/AJ%202017%20%28616%29.pdf

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