Soo, R. H. (2018). Investigation on plasma properties for deposition of titanium nitride film using reactive magnetron sputtering system.
Chicago Style (17th ed.) CitationSoo, Reh How. Investigation on Plasma Properties for Deposition of Titanium Nitride Film Using Reactive Magnetron Sputtering System. 2018.
MLA (9th ed.) CitationSoo, Reh How. Investigation on Plasma Properties for Deposition of Titanium Nitride Film Using Reactive Magnetron Sputtering System. 2018.
Warning: These citations may not always be 100% accurate.