Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
We report our research work on different type of Al oxide support layer in order to produce VA-SWCNTs. The electron beam (EB) deposition was mainly used to deposit high purity Al and Al2O3 thin film (20 nm). For the as-deposited Al metal layer, several oxidation treatments were elucidated to confirm...
| Main Authors: | Asyadi Azam, Mohd, Fujiwara, Akihiko, Shimoda, Tatsuya |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/4670/ http://eprints.utem.edu.my/id/eprint/4670/1/AMN-5_Abstract_Mohd_Asyadi_Azam.pdf |
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