Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique

We report our research work on different type of Al oxide support layer in order to produce VA-SWCNTs. The electron beam (EB) deposition was mainly used to deposit high purity Al and Al2O3 thin film (20 nm). For the as-deposited Al metal layer, several oxidation treatments were elucidated to confirm...

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Main Authors: Asyadi Azam, Mohd, Fujiwara, Akihiko, Shimoda, Tatsuya
Format: Conference or Workshop Item
Language:English
Published: 2011
Subjects:
Online Access:http://eprints.utem.edu.my/id/eprint/4670/
http://eprints.utem.edu.my/id/eprint/4670/1/AMN-5_Abstract_Mohd_Asyadi_Azam.pdf
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author Asyadi Azam, Mohd
Fujiwara, Akihiko
Shimoda, Tatsuya
author_facet Asyadi Azam, Mohd
Fujiwara, Akihiko
Shimoda, Tatsuya
author_sort Asyadi Azam, Mohd
building UTeM Institutional Repository
collection Online Access
description We report our research work on different type of Al oxide support layer in order to produce VA-SWCNTs. The electron beam (EB) deposition was mainly used to deposit high purity Al and Al2O3 thin film (20 nm). For the as-deposited Al metal layer, several oxidation treatments were elucidated to confirm the different in physical and chemical structures to act as catalyst support material. The post deposition oxidation treatments are natural oxidation, thermal oxidation, UV ozone, and plasma ashing oxidation. Characterization and analytical studies will be carried out by XPS, XRD, AFM, and SEM in order to understand what type of Al oxide support layer is suitable to support Co catalyst for VA-SWCNTs growth. This important research work is a reliable and good approach to deeply understand the step-by-step mechanism before implementing the device or application oriented studies.
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format Conference or Workshop Item
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institution Universiti Teknikal Malaysia Melaka
institution_category Local University
language English
last_indexed 2025-11-15T19:48:19Z
publishDate 2011
recordtype eprints
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spelling utem-46702015-05-28T03:27:15Z http://eprints.utem.edu.my/id/eprint/4670/ Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique Asyadi Azam, Mohd Fujiwara, Akihiko Shimoda, Tatsuya Q Science (General) TA Engineering (General). Civil engineering (General) We report our research work on different type of Al oxide support layer in order to produce VA-SWCNTs. The electron beam (EB) deposition was mainly used to deposit high purity Al and Al2O3 thin film (20 nm). For the as-deposited Al metal layer, several oxidation treatments were elucidated to confirm the different in physical and chemical structures to act as catalyst support material. The post deposition oxidation treatments are natural oxidation, thermal oxidation, UV ozone, and plasma ashing oxidation. Characterization and analytical studies will be carried out by XPS, XRD, AFM, and SEM in order to understand what type of Al oxide support layer is suitable to support Co catalyst for VA-SWCNTs growth. This important research work is a reliable and good approach to deeply understand the step-by-step mechanism before implementing the device or application oriented studies. 2011 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/4670/1/AMN-5_Abstract_Mohd_Asyadi_Azam.pdf Asyadi Azam, Mohd and Fujiwara, Akihiko and Shimoda, Tatsuya (2011) Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique. In: The Fifth International Conference on Advanced Materials and Nanotechnology (AMN-5), 5-13 February 2011, Wellington Convention Centre, Wellington, New Zealand.
spellingShingle Q Science (General)
TA Engineering (General). Civil engineering (General)
Asyadi Azam, Mohd
Fujiwara, Akihiko
Shimoda, Tatsuya
Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
title Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
title_full Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
title_fullStr Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
title_full_unstemmed Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
title_short Aluminum Oxide Support Layer for Vertical Growth of Single Walled Carbon Nanotube using Alcohol Catalytic CVD Technique
title_sort aluminum oxide support layer for vertical growth of single walled carbon nanotube using alcohol catalytic cvd technique
topic Q Science (General)
TA Engineering (General). Civil engineering (General)
url http://eprints.utem.edu.my/id/eprint/4670/
http://eprints.utem.edu.my/id/eprint/4670/1/AMN-5_Abstract_Mohd_Asyadi_Azam.pdf