Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional el...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Online Access: | http://eprints.utem.edu.my/id/eprint/4378/ http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf |
| _version_ | 1848887026185666560 |
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| author | White, Neil Harris, Nick Kok, Swee Leong Tudor, John |
| author_facet | White, Neil Harris, Nick Kok, Swee Leong Tudor, John |
| author_sort | White, Neil |
| building | UTeM Institutional Repository |
| collection | Online Access |
| description | Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 μm. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 kΩ resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2. |
| first_indexed | 2025-11-15T19:47:50Z |
| format | Conference or Workshop Item |
| id | utem-4378 |
| institution | Universiti Teknikal Malaysia Melaka |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T19:47:50Z |
| publishDate | 2008 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | utem-43782015-05-28T02:41:32Z http://eprints.utem.edu.my/id/eprint/4378/ Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures White, Neil Harris, Nick Kok, Swee Leong Tudor, John TK Electrical engineering. Electronics Nuclear engineering Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 μm. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 kΩ resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2. 2008 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf White, Neil and Harris, Nick and Kok, Swee Leong and Tudor, John (2008) Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures. In: 2nd Electronics System-Integration Technology, 1 - 4 September 2008, Greenwich, London.. http://ieeexplore.ieee.org/xpls/abs_all.jsp?tp=&arnumber=4684416 |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering White, Neil Harris, Nick Kok, Swee Leong Tudor, John Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures |
| title | Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures |
| title_full | Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures |
| title_fullStr | Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures |
| title_full_unstemmed | Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures |
| title_short | Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures |
| title_sort | novel thick-film piezoceramic micro-generator based on free-standing structures |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://eprints.utem.edu.my/id/eprint/4378/ http://eprints.utem.edu.my/id/eprint/4378/ http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf |