Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures

Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional el...

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Main Authors: White, Neil, Harris, Nick, Kok, Swee Leong, Tudor, John
Format: Conference or Workshop Item
Language:English
Published: 2008
Subjects:
Online Access:http://eprints.utem.edu.my/id/eprint/4378/
http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf
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author White, Neil
Harris, Nick
Kok, Swee Leong
Tudor, John
author_facet White, Neil
Harris, Nick
Kok, Swee Leong
Tudor, John
author_sort White, Neil
building UTeM Institutional Repository
collection Online Access
description Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 μm. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 kΩ resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2.
first_indexed 2025-11-15T19:47:50Z
format Conference or Workshop Item
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institution Universiti Teknikal Malaysia Melaka
institution_category Local University
language English
last_indexed 2025-11-15T19:47:50Z
publishDate 2008
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spelling utem-43782015-05-28T02:41:32Z http://eprints.utem.edu.my/id/eprint/4378/ Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures White, Neil Harris, Nick Kok, Swee Leong Tudor, John TK Electrical engineering. Electronics Nuclear engineering Thick-film piezoelectric free-standing structures fabricated with a combination of conventional thick-film technology and a sacrificial layer technique are presented. The structures were fabricated in the form of composite cantilevers, consisting of lead zirconate titanate (PZT) as the functional element and silver/palladium (Ag/Pd) as the electrodes. The cantilevers are free standing above a substrate and are able to operate at low levels of vibration suitable for harvesting energy from the environment. An open circuit output voltage of 130 mV was measured from a sample of length 18 mm, width 9 mm and PZT thickness of 80 μm. The sample was found to produce a maximum output electrical power of 10 nW at its resonant frequency of 237.5 Hz and acceleration level of 0.981 m/s2 when driving a 60 kΩ resistive load. The output power was found to increase exponentially with acceleration. At an acceleration of 9.81 ms-2, 270 nW of power was produced. The output power can be improved by attaching a proof mass at the tip of the cantilever beam. A beam having a proof mass of 1.14 g, resulted in an eight-fold improvement of output power compared to a device with no added proof mass at the same acceleration level of 0.98 ms-2. 2008 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf White, Neil and Harris, Nick and Kok, Swee Leong and Tudor, John (2008) Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures. In: 2nd Electronics System-Integration Technology, 1 - 4 September 2008, Greenwich, London.. http://ieeexplore.ieee.org/xpls/abs_all.jsp?tp=&arnumber=4684416
spellingShingle TK Electrical engineering. Electronics Nuclear engineering
White, Neil
Harris, Nick
Kok, Swee Leong
Tudor, John
Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
title Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
title_full Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
title_fullStr Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
title_full_unstemmed Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
title_short Novel Thick-Film Piezoceramic Micro-Generator Based on Free-Standing Structures
title_sort novel thick-film piezoceramic micro-generator based on free-standing structures
topic TK Electrical engineering. Electronics Nuclear engineering
url http://eprints.utem.edu.my/id/eprint/4378/
http://eprints.utem.edu.my/id/eprint/4378/
http://eprints.utem.edu.my/id/eprint/4378/1/p64.pdf