Die defect detection for integrated circuit using deep learning object detection techniques

Due to advances in semiconductor technology, the complexity of integrated circuit design continues to increase, resulting in ever-smaller defects appearing on these circuits. While some companies still rely on manual inspection for defect detection, these small and hard-to-see defects often lead to...

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Main Author: Wong, Tack Hwa
Format: Final Year Project / Dissertation / Thesis
Published: 2023
Subjects:
Online Access:http://eprints.utar.edu.my/6105/
http://eprints.utar.edu.my/6105/1/SE_1901610_TACK_HWA_WONG.pdf
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author Wong, Tack Hwa
author_facet Wong, Tack Hwa
author_sort Wong, Tack Hwa
building UTAR Institutional Repository
collection Online Access
description Due to advances in semiconductor technology, the complexity of integrated circuit design continues to increase, resulting in ever-smaller defects appearing on these circuits. While some companies still rely on manual inspection for defect detection, these small and hard-to-see defects often lead to high false detection rates due to the human eye's limitations. This study aims to replace manual inspection with an approach that uses object detection to identify subtle defects, which are die rotation and die cracks. The YOLOv5n model is trained to capture ROI and strengthened by incorporating the SAM model to enhance segmentation performance. To address the issue of limited defect images, the StyleGANv2 model is trained to generate extra defect images. The YOLOv7- tiny model has been trained for object detection, with several enhancements made to the network architecture and loss function, pruning is also applied to decrease computational demands. The final model boosts a 3% increase in mAP@0.5 and 2.5% increase in mAP@0.5:0.95, while reducing parameters by 65.34% and GFLOPS by 33.84% compared to the original YOLOv7-tiny model. This study demonstrates that object detection can be an effective method for detecting defects in integrated circuits. The proposed method is able to achieve high accuracy and efficiency.
first_indexed 2025-11-15T19:40:57Z
format Final Year Project / Dissertation / Thesis
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institution Universiti Tunku Abdul Rahman
institution_category Local University
last_indexed 2025-11-15T19:40:57Z
publishDate 2023
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spelling utar-61052023-11-24T17:45:38Z Die defect detection for integrated circuit using deep learning object detection techniques Wong, Tack Hwa QA76 Computer software Due to advances in semiconductor technology, the complexity of integrated circuit design continues to increase, resulting in ever-smaller defects appearing on these circuits. While some companies still rely on manual inspection for defect detection, these small and hard-to-see defects often lead to high false detection rates due to the human eye's limitations. This study aims to replace manual inspection with an approach that uses object detection to identify subtle defects, which are die rotation and die cracks. The YOLOv5n model is trained to capture ROI and strengthened by incorporating the SAM model to enhance segmentation performance. To address the issue of limited defect images, the StyleGANv2 model is trained to generate extra defect images. The YOLOv7- tiny model has been trained for object detection, with several enhancements made to the network architecture and loss function, pruning is also applied to decrease computational demands. The final model boosts a 3% increase in mAP@0.5 and 2.5% increase in mAP@0.5:0.95, while reducing parameters by 65.34% and GFLOPS by 33.84% compared to the original YOLOv7-tiny model. This study demonstrates that object detection can be an effective method for detecting defects in integrated circuits. The proposed method is able to achieve high accuracy and efficiency. 2023 Final Year Project / Dissertation / Thesis NonPeerReviewed application/pdf http://eprints.utar.edu.my/6105/1/SE_1901610_TACK_HWA_WONG.pdf Wong, Tack Hwa (2023) Die defect detection for integrated circuit using deep learning object detection techniques. Final Year Project, UTAR. http://eprints.utar.edu.my/6105/
spellingShingle QA76 Computer software
Wong, Tack Hwa
Die defect detection for integrated circuit using deep learning object detection techniques
title Die defect detection for integrated circuit using deep learning object detection techniques
title_full Die defect detection for integrated circuit using deep learning object detection techniques
title_fullStr Die defect detection for integrated circuit using deep learning object detection techniques
title_full_unstemmed Die defect detection for integrated circuit using deep learning object detection techniques
title_short Die defect detection for integrated circuit using deep learning object detection techniques
title_sort die defect detection for integrated circuit using deep learning object detection techniques
topic QA76 Computer software
url http://eprints.utar.edu.my/6105/
http://eprints.utar.edu.my/6105/1/SE_1901610_TACK_HWA_WONG.pdf