Simulation of 3D wafer surface reconstruction by wavefront sensing methods
| Main Author: | |
|---|---|
| Format: | Final Year Project / Dissertation / Thesis |
| Published: |
2013
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| Subjects: | |
| Online Access: | http://eprints.utar.edu.my/1493/ http://eprints.utar.edu.my/1493/1/ESA%2D2014%2D1101666%2D1.pdf |
| _version_ | 1848885453232537600 |
|---|---|
| author | Ng, Yong Han |
| author_facet | Ng, Yong Han |
| author_sort | Ng, Yong Han |
| building | UTAR Institutional Repository |
| collection | Online Access |
| first_indexed | 2025-11-15T19:22:50Z |
| format | Final Year Project / Dissertation / Thesis |
| id | utar-1493 |
| institution | Universiti Tunku Abdul Rahman |
| institution_category | Local University |
| last_indexed | 2025-11-15T19:22:50Z |
| publishDate | 2013 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | utar-14932017-08-14T03:20:06Z Simulation of 3D wafer surface reconstruction by wavefront sensing methods Ng, Yong Han TK Electrical engineering. Electronics Nuclear engineering 2013-08 Final Year Project / Dissertation / Thesis NonPeerReviewed application/pdf http://eprints.utar.edu.my/1493/1/ESA%2D2014%2D1101666%2D1.pdf Ng, Yong Han (2013) Simulation of 3D wafer surface reconstruction by wavefront sensing methods. Master dissertation/thesis, UTAR. http://eprints.utar.edu.my/1493/ |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Ng, Yong Han Simulation of 3D wafer surface reconstruction by wavefront sensing methods |
| title | Simulation of 3D wafer surface reconstruction by wavefront sensing methods |
| title_full | Simulation of 3D wafer surface reconstruction by wavefront sensing methods |
| title_fullStr | Simulation of 3D wafer surface reconstruction by wavefront sensing methods |
| title_full_unstemmed | Simulation of 3D wafer surface reconstruction by wavefront sensing methods |
| title_short | Simulation of 3D wafer surface reconstruction by wavefront sensing methods |
| title_sort | simulation of 3d wafer surface reconstruction by wavefront sensing methods |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://eprints.utar.edu.my/1493/ http://eprints.utar.edu.my/1493/1/ESA%2D2014%2D1101666%2D1.pdf |