FEA MEMS Packaging For Sensor

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FEA MEMS Packaging For Sensor

Mechanical characteristics of a sensor microbeam based on resonance frequency for gas detection and their dependence on the geometry and materials is investigated in this paper. These microbeam structures will be modeled in Finite Element Analysis software (ANSYS 7.0). The microbeam structu...

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Bibliographic Details
Main Author:	Abdullah@Muhamad, Maswandy
Format:	Monograph
Language:	English
Published:	Universiti Sains Malaysia 2005
Subjects:	T Technology TJ Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/58170/ http://eprints.usm.my/58170/1/Fea%20MEMS%20Packaging%20For%20Sensor_Maswandy%20Abdullah%40Muhamad.pdf

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