Finite Element Analysis Of An Actuator In MEMS Application

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Finite Element Analysis Of An Actuator In MEMS Application

There have many applications in MEMS can be developed by a PZT actuator such as in data storage system, medical and RF system. This project focuses on high density data storage system which the PZT actuator namely microheater was placed. The main function of this microheater in high density da...

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Bibliographic Details
Main Author:	Ce Ku Zanggi, Che Ku Mohd Arif
Format:	Monograph
Language:	English
Published:	Universiti Sains Malaysia 2005
Subjects:	T Technology TJ Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/58162/ http://eprints.usm.my/58162/1/Finite%20Element%20Analysis%20Of%20An%20Actuator%20In%20Mems%20Application_Che%20Ku%20Mohd%20Arif%20Ce%20Ku%20Zanggi.pdf

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