Investigation Of Oxidation Process On SOI Wafer

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Investigation Of Oxidation Process On SOI Wafer

Silicon-on-Insulator, SOI wafer technology is widely used in microelectronic devices due to its advantages that have been used to minimize or eliminate substrate leakage and improve design performance. They have fast speeds, error reduction, low power consumption, increased scaling, and latch-up i...

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Bibliographic Details
Main Author:	Salleh, Shaharatul A’ini
Format:	Monograph
Language:	English
Published:	Universiti Sains Malaysia 2022
Subjects:	T Technology TN Mining Engineering. Metallurgy
Online Access:	http://eprints.usm.my/56673/ http://eprints.usm.my/56673/1/Investigation%20Of%20Oxidation%20Process%20On%20SOI%20Wafer_Shaharatul%20A%E2%80%99ini%20Salleh.pdf

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