Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.

Fabrication, Characterization And Humidity Sensing Properties Of Radio Frequency Magnetron Sputtered Calcium Copper Titanate (CCTO) Thin Film.

Resistance-type humidity sensor based on CCTO thin films which are capable of sensing of humidity in the range of 30%-90% and short period of time have been successfully fabricated by using radio frequency (RF) magnetron sputtering technique. The CCTO thin film humidity sensor based-on resistance me...

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Bibliographic Details
Main Author: Ahmadipour, Mohsen
Format: Thesis
Language:English
Published: 2018
Subjects:
T Technology
TN Mining Engineering. Metallurgy
Online Access:http://eprints.usm.my/56071/
http://eprints.usm.my/56071/1/Fabrication%2C%20Characterization%20And%20Humidity%20Sensing%20Properties%20Of%20Radio%20Frequency%20Magnetron%20Sputtered%20Calcium%20Copper%20Titanate%20%28CCTO%29%20Thin%20Film_Mohsen%20Ahmadipour.pdf

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