Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.
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| Format: | Thesis |
| Language: | English |
| Published: |
2002
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| Subjects: | |
| Online Access: | http://eprints.usm.my/5568/ http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf |
| _version_ | 1848869761690107904 |
|---|---|
| author | Aw, Kean Chin |
| author_facet | Aw, Kean Chin |
| author_sort | Aw, Kean Chin |
| building | USM Institutional Repository |
| collection | Online Access |
| description | Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian.
Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. |
| first_indexed | 2025-11-15T15:13:26Z |
| format | Thesis |
| id | usm-5568 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T15:13:26Z |
| publishDate | 2002 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-55682017-04-14T12:18:39Z http://eprints.usm.my/5568/ Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] Aw, Kean Chin QC Physics Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. 2002-11 Thesis NonPeerReviewed application/pdf en http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf Aw, Kean Chin (2002) Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]. PhD thesis, Universiti Sains Malaysia. |
| spellingShingle | QC Physics Aw, Kean Chin Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_full | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_fullStr | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_full_unstemmed | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_short | Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_sort | growth and characterisation of low-k dielectric spin on glass [qc585. a963 2002 f rb] [microfiche 7021] |
| topic | QC Physics |
| url | http://eprints.usm.my/5568/ http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf |