Gallium Nitride (Gan) Based Gas Sensor
Using Catalytic Metal

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Gallium Nitride (Gan) Based Gas Sensor Using Catalytic Metal

In this work, Pt, Pd, Ag and Ni were deposited on p type and n type of GaN and AIGaN as catalytic metals contact using sputtering system through meta! mask to detect N2, H2 and CH4 gases with different concentrations and different metal thicknesses with a range of SO-300nm. Samples were annealed...

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Bibliographic Details
Main Author:	Hudeish, Abdo Yahya Omer
Format:	Thesis
Language:	English
Published:	2005
Subjects:	QC1 Physics (General)
Online Access:	http://eprints.usm.my/55540/ http://eprints.usm.my/55540/1/abdo%20yahya.pdf

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