Development Of Micro Heating Element By Optical Lithography On Alumina Substrate

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Development Of Micro Heating Element By Optical Lithography On Alumina Substrate

Optical lithography has been used to deposit resist coatings with desired pattern on flat substrate typically silicon wafer. Yet, rather little attention has been given to the development of Fe-Cr-Al alloys on alumina substrate. Thus, a particular interest has been given to the study of Fe-Cr-Al...

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Bibliographic Details
Main Author:	Tan, Teong Sheng
Format:	Monograph
Language:	English
Published:	Universiti Sains Malaysia 2017
Subjects:	T Technology TJ Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/53556/ http://eprints.usm.my/53556/1/Development%20Of%20Micro%20Heating%20Element%20By%20Optical%20Lithography%20On%20Alumina%20Substrate_Tan%20Teong%20Sheng_M4_2017.pdf

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