Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film

Effect Of Deposition Temperature And Type Of Substrates On Structural, Surface Morphology And Optical Properties Of Rf Magnetron Sputtered Ccto Thin Film

Calcium copper titanate (CCTO) thin film with high dielectric permittivity (ε), low tangent loss (tan δ) and have high temperature phase stability up to 300 °C is very importance for several advanced microelectronic applications. The electrical and optical properties are depended on the structural a...

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Bibliographic Details
Main Author: Cheah, Wei Kian
Format: Monograph
Language:English
Published: Universiti Sains Malaysia 2017
Subjects:
T Technology
TA401-492 Materials of engineering and construction. Mechanics of materials
Online Access:http://eprints.usm.my/52441/
http://eprints.usm.my/52441/1/Effect%20Of%20Deposition%20Temperature%20And%20Type%20Of%20Substrates%20On%20Structural%2C%20Surface%20Morphology%20And%20Optical%20Properties%20Of%20Rf%20Magnetron%20Sputtered%20Ccto%20Thin%20Film_Cheah%20Wei%20Kian_B1_2017.pdf

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