Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method

In this paper, the effects of different annealing growth conditions on the structural, surface morphology and optical properties of the grown β-Ga2O3 thin films on p- Si(100) substrates via sol-gel dip coating were reported. Field-emission scanning electron microscopy observations shows uniform and...

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Main Authors: Hamid, Maizatul Akmam Ab, Ng, Sha Shiong, Hassan, Zainuriah
Format: Conference or Workshop Item
Language:English
Published: 2020
Subjects:
Online Access:http://eprints.usm.my/49090/
http://eprints.usm.my/49090/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2072.pdf
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author Hamid, Maizatul Akmam Ab
Ng, Sha Shiong
Hassan, Zainuriah
author_facet Hamid, Maizatul Akmam Ab
Ng, Sha Shiong
Hassan, Zainuriah
author_sort Hamid, Maizatul Akmam Ab
building USM Institutional Repository
collection Online Access
description In this paper, the effects of different annealing growth conditions on the structural, surface morphology and optical properties of the grown β-Ga2O3 thin films on p- Si(100) substrates via sol-gel dip coating were reported. Field-emission scanning electron microscopy observations shows uniform and densely packed grains as well as decreasing pinholes are formed at annealing temperatures of 900⁰C. As the annealing temperatures increase from 700⁰C to 1200⁰C, the crystallinity of the β-Ga2O3 (400) peak at 900⁰C shows improved quality as well as increases crystallite size, D and decreasing FWHM value. The root-mean-square (rms) surface roughness of the deposited β-Ga2O3 thin films increases from 0.479 nm to 91.0 nm when annealing temperature increased from 700⁰C to 1200⁰C and exhibits nanocrystalline structure at 900⁰C. FTIR measurements demonstrated that the reflectivity spectra of β-Ga2O3 thin films increases from 700⁰C and diminishes above 1000⁰C. Finally, all the results revealed that 900⁰C in air ambient was the best annealing growth conditions to deposit β-Ga2O3 thin film and have high potential for deep UV photodetector applications.
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format Conference or Workshop Item
id usm-49090
institution Universiti Sains Malaysia
institution_category Local University
language English
last_indexed 2025-11-15T18:17:28Z
publishDate 2020
recordtype eprints
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spelling usm-490902021-05-04T03:41:21Z http://eprints.usm.my/49090/ Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method Hamid, Maizatul Akmam Ab Ng, Sha Shiong Hassan, Zainuriah QC1-999 Physics In this paper, the effects of different annealing growth conditions on the structural, surface morphology and optical properties of the grown β-Ga2O3 thin films on p- Si(100) substrates via sol-gel dip coating were reported. Field-emission scanning electron microscopy observations shows uniform and densely packed grains as well as decreasing pinholes are formed at annealing temperatures of 900⁰C. As the annealing temperatures increase from 700⁰C to 1200⁰C, the crystallinity of the β-Ga2O3 (400) peak at 900⁰C shows improved quality as well as increases crystallite size, D and decreasing FWHM value. The root-mean-square (rms) surface roughness of the deposited β-Ga2O3 thin films increases from 0.479 nm to 91.0 nm when annealing temperature increased from 700⁰C to 1200⁰C and exhibits nanocrystalline structure at 900⁰C. FTIR measurements demonstrated that the reflectivity spectra of β-Ga2O3 thin films increases from 700⁰C and diminishes above 1000⁰C. Finally, all the results revealed that 900⁰C in air ambient was the best annealing growth conditions to deposit β-Ga2O3 thin film and have high potential for deep UV photodetector applications. 2020-12-02 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/49090/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2072.pdf Hamid, Maizatul Akmam Ab and Ng, Sha Shiong and Hassan, Zainuriah (2020) Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method. In: 5th Meeting of Malaysia Nitrides Research Group (MNRG 2020), 1-2 December 2020.
spellingShingle QC1-999 Physics
Hamid, Maizatul Akmam Ab
Ng, Sha Shiong
Hassan, Zainuriah
Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method
title Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method
title_full Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method
title_fullStr Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method
title_full_unstemmed Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method
title_short Effects Of Annealing Growth Conditions Of β-Ga2O3 Thin Films For Solar Blind UV Photodetectors By Using Sol-Gel Dip Coating Method
title_sort effects of annealing growth conditions of β-ga2o3 thin films for solar blind uv photodetectors by using sol-gel dip coating method
topic QC1-999 Physics
url http://eprints.usm.my/49090/
http://eprints.usm.my/49090/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2072.pdf