Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer

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Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer

This work will describe the influence of molarity and time of potassium hydroxide etching on Al-rich AlGaN layer. With potassium hydroxide (KOH) molarity of 5 mol/L, no significant change on the pores formation was observed for 5 and 10 minutes of etching. Nonetheless, there was a possibilty that s...

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Bibliographic Details
Main Authors:	Yusuf, Yusnizam, Wee, Kie Tang, Taib, Muhamad Ikram Md, Zainal, Norzaini
Format:	Conference or Workshop Item
Language:	English
Published:	2020
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/49066/ http://eprints.usm.my/49066/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2060.pdf

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