Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer
This work will describe the influence of molarity and time of potassium hydroxide etching on Al-rich AlGaN layer. With potassium hydroxide (KOH) molarity of 5 mol/L, no significant change on the pores formation was observed for 5 and 10 minutes of etching. Nonetheless, there was a possibilty that s...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2020
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| Online Access: | http://eprints.usm.my/49066/ http://eprints.usm.my/49066/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2060.pdf |
| _version_ | 1848881333561982976 |
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| author | Yusuf, Yusnizam Wee, Kie Tang Taib, Muhamad Ikram Md Zainal, Norzaini |
| author_facet | Yusuf, Yusnizam Wee, Kie Tang Taib, Muhamad Ikram Md Zainal, Norzaini |
| author_sort | Yusuf, Yusnizam |
| building | USM Institutional Repository |
| collection | Online Access |
| description | This work will describe the influence of molarity and time of potassium hydroxide etching on Al-rich AlGaN layer. With potassium hydroxide (KOH) molarity of 5
mol/L, no significant change on the pores formation was observed for 5 and 10 minutes of etching. Nonetheless, there was a possibilty that some of the Ga atoms were eliminated for 10 minutes of etching, resulting in co-existance of AlGaN material with higher Al content.
Similar behaviour was also witnessed in the case for 10 mol/L of KOH with 5 and 10 minutes of etching. Nonetheless, well-defined hexagonal patterns were only formed when the etching was conducted using 10 mol/L of KOH for 10 minutes. Such patterns have the potential to
increase light extraction efficiency of UV LEDs. |
| first_indexed | 2025-11-15T18:17:21Z |
| format | Conference or Workshop Item |
| id | usm-49066 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T18:17:21Z |
| publishDate | 2020 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-490662021-04-30T02:12:07Z http://eprints.usm.my/49066/ Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer Yusuf, Yusnizam Wee, Kie Tang Taib, Muhamad Ikram Md Zainal, Norzaini QC1-999 Physics This work will describe the influence of molarity and time of potassium hydroxide etching on Al-rich AlGaN layer. With potassium hydroxide (KOH) molarity of 5 mol/L, no significant change on the pores formation was observed for 5 and 10 minutes of etching. Nonetheless, there was a possibilty that some of the Ga atoms were eliminated for 10 minutes of etching, resulting in co-existance of AlGaN material with higher Al content. Similar behaviour was also witnessed in the case for 10 mol/L of KOH with 5 and 10 minutes of etching. Nonetheless, well-defined hexagonal patterns were only formed when the etching was conducted using 10 mol/L of KOH for 10 minutes. Such patterns have the potential to increase light extraction efficiency of UV LEDs. 2020-12-02 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/49066/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2060.pdf Yusuf, Yusnizam and Wee, Kie Tang and Taib, Muhamad Ikram Md and Zainal, Norzaini (2020) Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer. In: 5th Meeting of Malaysia Nitrides Research Group (MNRG 2020), 1-2 December 2020. |
| spellingShingle | QC1-999 Physics Yusuf, Yusnizam Wee, Kie Tang Taib, Muhamad Ikram Md Zainal, Norzaini Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer |
| title | Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer |
| title_full | Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer |
| title_fullStr | Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer |
| title_full_unstemmed | Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer |
| title_short | Influence Of Molarity And Time Of Potassium Hydroxide Etching On Al-Rich AlGaN Layer |
| title_sort | influence of molarity and time of potassium hydroxide etching on al-rich algan layer |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/49066/ http://eprints.usm.my/49066/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2060.pdf |