Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD
This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase st...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2017
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| Subjects: | |
| Online Access: | http://eprints.usm.my/49005/ http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf |
| _version_ | 1848881317991677952 |
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| author | Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah |
| author_facet | Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah |
| author_sort | Siowwoon, Ng |
| building | USM Institutional Repository |
| collection | Online Access |
| description | This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet
(UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination. |
| first_indexed | 2025-11-15T18:17:06Z |
| format | Conference or Workshop Item |
| id | usm-49005 |
| institution | Universiti Sains Malaysia |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-15T18:17:06Z |
| publishDate | 2017 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | usm-490052021-04-23T01:58:32Z http://eprints.usm.my/49005/ Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah QC1-999 Physics This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination. 2017 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf Siowwoon, Ng and Sau, Siong Tneh and Fong, Kwong Yam and Hassan, Zainuriah (2017) Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD. In: The International Conference of Solid State Science and Technology (ICSSST 2017). |
| spellingShingle | QC1-999 Physics Siowwoon, Ng Sau, Siong Tneh Fong, Kwong Yam Hassan, Zainuriah Optical Properties and UV Sensing Response of Nitrogendoped TiO2 Thin Film by CVD |
| title | Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_full | Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_fullStr | Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_full_unstemmed | Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_short | Optical Properties and UV Sensing Response of Nitrogendoped
TiO2 Thin Film by CVD |
| title_sort | optical properties and uv sensing response of nitrogendoped
tio2 thin film by cvd |
| topic | QC1-999 Physics |
| url | http://eprints.usm.my/49005/ http://eprints.usm.my/49005/1/ZH_17.pdf%20cut.pdf |