Fabrication and Characterization of Cu-doped ZnO Films using rf Reactive Magnetron Sputtering

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Fabrication and Characterization of Cu-doped ZnO Films using rf Reactive Magnetron Sputtering

ZnO thin films have emerged as an interesting research area owing to its useful properties. Recently, lots of attention have been attracted to doped ZnO with Cu atom due to its favourable potential in semiconductor devices. Pure and Cu-doped ZnO (CZO) thin films were deposited on the glass, p-GaN/AI...

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Bibliographic Details
Main Authors:	Yusof, A. S., Hassan, Z., Zainal, N.
Format:	Conference or Workshop Item
Language:	English
Published:	2017
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48834/ http://eprints.usm.my/48834/1/ZH17_OP09.pdf%20done.pdf

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