Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique

Alternating current photo-assisted electrochemical etching (ACPEC) process was used to produce the formation of porous silicon with different ultra-violet(UV) light intensity. The study aims to investigate the effect of different UV light illumination on the properties of porous silicon. The surface...

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Main Authors: Sohimee, Siti Nurfarhana, Hassan, Zainuriah, Ahmed, Naser Mahmoud, Lim, Way Foong, Quah, Hock Jin
Format: Conference or Workshop Item
Language:English
Published: 2017
Subjects:
Online Access:http://eprints.usm.my/48823/
http://eprints.usm.my/48823/1/ZH17_OP02_1.pdf%20done.pdf
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author Sohimee, Siti Nurfarhana
Hassan, Zainuriah
Ahmed, Naser Mahmoud
Lim, Way Foong
Quah, Hock Jin
author_facet Sohimee, Siti Nurfarhana
Hassan, Zainuriah
Ahmed, Naser Mahmoud
Lim, Way Foong
Quah, Hock Jin
author_sort Sohimee, Siti Nurfarhana
building USM Institutional Repository
collection Online Access
description Alternating current photo-assisted electrochemical etching (ACPEC) process was used to produce the formation of porous silicon with different ultra-violet(UV) light intensity. The study aims to investigate the effect of different UV light illumination on the properties of porous silicon. The surface of n-type silicon (111) was selectively etched in the HF and ethanol solution with ratio (5:20) for 30 minutes under different UV lamp intensity; 40%, 50% and 60%. The samples were characterized by using field emission scanning electron microscope (FESEM), atomic force microscopy (AFM) and high resolution X-ray diffraction (HR-XRD).
first_indexed 2025-11-15T18:16:16Z
format Conference or Workshop Item
id usm-48823
institution Universiti Sains Malaysia
institution_category Local University
language English
last_indexed 2025-11-15T18:16:16Z
publishDate 2017
recordtype eprints
repository_type Digital Repository
spelling usm-488232021-04-09T02:47:20Z http://eprints.usm.my/48823/ Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique Sohimee, Siti Nurfarhana Hassan, Zainuriah Ahmed, Naser Mahmoud Lim, Way Foong Quah, Hock Jin QC1-999 Physics Alternating current photo-assisted electrochemical etching (ACPEC) process was used to produce the formation of porous silicon with different ultra-violet(UV) light intensity. The study aims to investigate the effect of different UV light illumination on the properties of porous silicon. The surface of n-type silicon (111) was selectively etched in the HF and ethanol solution with ratio (5:20) for 30 minutes under different UV lamp intensity; 40%, 50% and 60%. The samples were characterized by using field emission scanning electron microscope (FESEM), atomic force microscopy (AFM) and high resolution X-ray diffraction (HR-XRD). 2017 Conference or Workshop Item PeerReviewed application/pdf en http://eprints.usm.my/48823/1/ZH17_OP02_1.pdf%20done.pdf Sohimee, Siti Nurfarhana and Hassan, Zainuriah and Ahmed, Naser Mahmoud and Lim, Way Foong and Quah, Hock Jin (2017) Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique. In: The International Conference of Solid State Science and Technology (ICSSST ), 13–16 November 2017, Penang, Malaysia. https://iopscience.iop.org/article/10.1088/1742-6596/1083/1/012034/pdf
spellingShingle QC1-999 Physics
Sohimee, Siti Nurfarhana
Hassan, Zainuriah
Ahmed, Naser Mahmoud
Lim, Way Foong
Quah, Hock Jin
Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique
title Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique
title_full Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique
title_fullStr Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique
title_full_unstemmed Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique
title_short Effect of Different UV Light Intensity on Porous Silicon Fabricated by Using Alternating Current photo-assisted Electrochemical Etching (ACPEC) Technique
title_sort effect of different uv light intensity on porous silicon fabricated by using alternating current photo-assisted electrochemical etching (acpec) technique
topic QC1-999 Physics
url http://eprints.usm.my/48823/
http://eprints.usm.my/48823/
http://eprints.usm.my/48823/1/ZH17_OP02_1.pdf%20done.pdf