Comparative Study of Gas Ratio on Indium Nitride Thin Films Grown on Flexible Substrates Prepared by Reactive Sputtering Method

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Comparative Study of Gas Ratio on Indium Nitride Thin Films Grown on Flexible Substrates Prepared by Reactive Sputtering Method

In this report, indium nitride thin fi lms were deposited on kapton polyimide flexible substrate by reactive radio frequency (RF) sputtering method using an indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different gas ratio, i.e 90:10, 80 20, 70 30 and 6040 of...

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Bibliographic Details
Main Authors:	Osman, Siti Aisyah, Ng, Sha Shiong
Format:	Conference or Workshop Item
Language:	English
Published:	2017
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48806/ http://eprints.usm.my/48806/1/NG17_OP09.pdf%20done.pdf

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