Aluminum Nitride Thin Films Grown Sol-gel Spin Coating Technique

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Aluminum Nitride Thin Films Grown Sol-gel Spin Coating Technique

In this study, aluminum nitride (AIN) thin films were grown on p-type silicon (1 00) substrate by sol-gel spin coating method. Two types of ethanol-based precursors were prepared , namely, precursors with and without the aid of diethanolamine (DEA). The objective of this work is to investigate the e...

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Bibliographic Details
Main Authors:	Isa, Nurul Atikah Mohd, Ng, Sha Shiong, Hassan, Zainuriah
Format:	Conference or Workshop Item
Language:	English
Published:	2017
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48804/ http://eprints.usm.my/48804/1/NG17_OP07.pdf%20done.pdf

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