Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering

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Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering

This paper presents the study and characterization of indium nitride (InN) films grown on quartz glass and p-Si (111) substrates by RF magnetron sputtering method using pure indium target in argon (Ar) and nitrogen (N 2) environment. The characterization was carried out by high resolution X-ray di...

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Bibliographic Details
Main Authors:	Bashir, Umar, Hassan, Zainuriah, Ahmed, Naser M.
Format:	Conference or Workshop Item
Language:	English
Published:	2016
Subjects:	QC1-999 Physics
Online Access:	http://eprints.usm.my/48795/ http://eprints.usm.my/48795/1/ZO3.pdf%20done.pdf

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